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Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A. / editors, Seshu B. Desu, David B. Beach, Peter C. van Buskirk
(Materials Research Society symposium proceedings ; v. 415)

データ種別	図書
出版者	Pittsburgh, Pa. : Materials Research Society
出版年	c1996
形態	xi, 264 p. : ill. ; 24 cm
著者標目	Desu, Seshu B. Beach, David B. Van Buskirk, Peter C.
件　名	LCSH:Electronic ceramics -- Congresses  全ての件名で検索 LCSH:Chemical vapor deposition -- Congresses  全ての件名で検索 LCSH:Thin films -- Congresses  全ての件名で検索
分　類	NDC:501.4 NDC:573 LCC:TK7871.15.C4 DC20:621.3815/2
書誌ID	LT00524103

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